Radio freq low temperature asher (NSN 6640-01-016-4594)
General Description
Rf system operating frequency 13.56 mhz, net power output 100-500 w, service power 110/220 vac, 50/60 hz, 1 kva, 3-range power meter, automatic tuning; 4 pyrex oxidation chambers, 4 in. Id, 8.5 in. L; vacuum pump, 330 lpm, 1 in. Id connecting hose, gas-flow meter, vacuum meter
