Special Features
Ion gage controller with dual gage option; standard 1/2 rack instrumentation package; mounting in 19.00 inch rack or with another 1/2 rack instrument; includes 2 10 ft cables
End Application
Tgg coplanarity unit
Functional Description
Works with the mks 252 throttle valve nsn 6685-01-262-6355 as part of the downstream pressure control system
Supplementary Features
Manufacturers name: ionization vacuum gage control unit and gage tube
